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VDI 2083 Blatt 3:2005-07 (R2015)
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VDI 2083 Blatt 3:2005-07 (R2015)
Cleanroom technology - Metrology and test methodsMore info
This guideline specifies measurement procedures for cleanrooms, which are applied during handing over, in the context of the qualification of new installations, for routine checks and for continuous monitoring. The methods described here are tailored to the needs of cleanrooms, thus being different from measurement procedures for other technical systems.
| Author | VDI |
|---|---|
| Editor | VDI |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-12-01 |
| ICS | 13.040.35 : Cleanrooms and associated controlled environments
|
| Number of pages | 40 |
| Replace | VDI 2083 Blatt 3 (1983-02) |
| Set | VDI-Handbuch Reinraumtechnik |
| Year | 2005 |
| Document history | VDI 2083 Blatt 3 (2005-07) |
| Country | Germany |
| Keyword | VDI 2083;2083 |