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VDI 2083 Blatt 13.2:2009-01 (R2015)
New product
VDI 2083 Blatt 13.2:2009-01 (R2015)
Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applicationsMore info
| Author | VDI |
|---|---|
| Editor | VDI |
| Document type | Standard |
| Format | File |
| Confirmation date | 2015-12-01 |
| ICS | 13.040.35 : Cleanrooms and associated controlled environments
|
| Number of pages | 52 |
| Replace | VDI 2083 Blatt 13.2 (2008-03) |
| Set | VDI-Handbuch Reinraumtechnik |
| Year | 2009 |
| Document history | VDI 2083 Blatt 13.2 (2009-01) |
| Country | Germany |
| Keyword | VDI 2083;2083 |