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VDI/VDE 2655 Blatt 1.2:2010-10 (R2018)
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VDI/VDE 2655 Blatt 1.2:2010-10 (R2018)
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurementMore info
The guideline describes procedures for the Calibration of confocal microscopes and depth setting standards for roughness measurement and establish thereby the basic for traceability of measuring systems to national standars. First the procedure of determination of the calibration abilities is described. Further basic conditions for the calibration as well as minimum requirements to the calibration procedure are specified. Finally the requirements to the calibration report are specified. A GUM conformal model for the determination of the uncertainty of measurement completes the instructions.
| Author | VDI |
|---|---|
| Editor | VDI |
| Document type | Standard |
| Format | File |
| Confirmation date | 2018-12-01 |
| ICS | 17.180.01 : Optics and optical measurements in general
37.020 : Optical equipment |
| Number of pages | 36 |
| Replace | VDE/VDI 2604 (1971-06) |
| Set | VDI/VDE-Handbuch Fertigungsmesstechnik,VDI/VDE-Handbuch Optische Technologien,VDI-Handbuch Produktionstechnik und Fertigungsverfahren Band 3 |
| Year | 2010 |
| Document history | VDI/VDE 2655 Blatt 1.2 (2010-10) |
| Country | Germany |
| Keyword | VDI 2655;VDI 2655 Blatt 1.2;VDI/VDE 2655;2655 |