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VDI/VDE 2655 Blatt 1.3:2018-03
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VDI/VDE 2655 Blatt 1.3:2018-03
Optical measurement of microtopography - Calibration of interference microscopes for form measurementMore info
This standard characterises interference microscopes with their measuring technology properties for measuring the surfaces of form elements. This includes the feedback and the calculation of the measurement uncertainty when measuring shape parameters. In addition to the interference microscopes described in VDI 2655 Part 1.1, the methods described here can also be applied to interferometers whose measuring fields can have dimensions of up to approx. Ø 20 mm.
| Author | VDI |
|---|---|
| Editor | VDI |
| Document type | Standard |
| Format | File |
| expiration_de_validite | 2018-08-31 |
| ICS | 17.180.01 : Optics and optical measurements in general
|
| Number of pages | 31 |
| Year | 2018 |
| Document history | |
| Country | Germany |
| Keyword | VDI 2655;VDI 2655 Blatt 1.3;VDI/VDE 2655;2655 |