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BS IEC 62047-31:2019

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BS IEC 62047-31:2019

Semiconductor devices. Micro-electromechanical devices - Four-point bending test method for interfacial adhesion energy of layered MEMS materials

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 96660 6
ICS 31.080.99 : Other semiconductor devices
Number of pages 16
Cross references IEC 62047-31 Ed1.0
Year 2019
Country United Kingdom