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BS IEC 63068-2:2019

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BS IEC 63068-2:2019

Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Test method for defects using optical inspection

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Author BSI
Editor BSI
Document type Standard
Format File
EAN ISBN 978 0 580 51374 9
ICS 31.080.99 : Other semiconductor devices
Number of pages 28
Cross references IEC 63068-2:2019
Year 2019
Country United Kingdom